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Flame Detectors for Semiconductor Tools

Fire safety systems designed to protect semiconductor manufacturing equipment typically use flame detectors to alert the presence of a fire in a semiconductor tool. These critical devices are a very important part of a semiconductor equipment fire suppression system. There are many different kinds of flame detectors, and it is important to use the right kind of flame detector, and to have it installed in the right place in the tool. Flame detectors are designed to see the heat signatures that are created by flames. Different fuel sources create different flame signatures. It is important that a fire safety system is designed with a flame detector that can see potential flame signatures fueled by the respective chemistry in a semiconductor process tool. Furthermore, a good flame detector can distinguish between a fire and other types of light and heat sources such as a flash light or welding gun.

How CO2 Fire Suppression Systems Work

There are many kinds of flame detectors, which look for different bands of light.

  • Ultraviolet Light (UV)
  • Infrared Light (IR)
  • Wide band Infrared Light (WBIR)
  • Narrow Band Infrared Light (NBIR)
  • Visible Spectrum (VIS)
Different Bands of Light

Flame Detectors FOV

The field of view (FOV) of a flame detector is important in detecting a fire. If the flame detector is not looking at a flame, it cannot see it. The typical field of view for a flame detector is 110-120º. Please note: The field of view of a flame detector is often obstructed by obstacles in a semiconductor process tool. The fire safety system design must take all obstructions into account when positioning the flame detection. Furthermore, most flame detectors cannot see through glass and many other transparent materials.

Choosing the Right Flame Detector

Not all flame detectors are approved for use in semiconductor process equipment. Flame detectors must go through the rigorous process of SEMI S2 / NFPA compliance testing and approval before they can be safely used in the most critical areas of semiconductor manufacturing.

Common Semiconductor Industry FM-Approved Flame Detectors

  • Sierra DCR1 (UV/WBIR)
  • Det-Tronics PM-5MPX (Dual NBIR)
  • Hatsuta SX-7000 (Triple NBIR)
  • Fire Sentry FS7/FS17X (WBIR, NBIR & VIS)
  • KFPI UV2X3 (UV)

Flame Detector Reliability

  • Choice of Flame Detectors is Very Important
    • Reliable Operation
    • False Alarm Immunity
    • Discharge Failure Risk
  • Right Type of Detectors for Each Hazard
    • Fuel Type
    • Chemical Compatibility
    • Airflow

KFPI FM-Approved Flame Detectors

KFPI has its own brand of flame detectors. These have been selected from the best technology in the world, and are manufactured and custom-labeled for KFPI.

  • Intelligent Reliable Algorithms
    • 3ft or 12ft Sensitivity Options
    • UV or UV/IR
  • (2) Alarm & (1) Fault Signals
    • Alarm = 5sec
    • Alarm Verify = 15sec*
  • Corrosive Compatible
    • PVDF Housing with Coated Quartz Lens (Corrosives)
    • FRPP Housing with Quartz Lens (Solvents)
  • 15sec Event Log (Proof)

Please contact us with your requirements.

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