MOCVD

Don't let the gremlins get you down
Don’t Let the Gremlins Get you Down!

Fire is one of the gremlins of semiconductor process equipment. Great thought and energy have been dedicated to the task of designing process tools that have the lowest probability for fire hazard. But, all of the elements for equipment fire are still rooted in the reality incompatibles like heat, electricity, and flammable chemistries in ample quantities.