Gas Detection Systems & Products

Picarro Solution for AMC Monitoring

Measuring airborne molecular contamination (AMC) at low levels is extremely challenging in the semiconductor manufacturing environment. Picarro enables fab operators to overcome these challenges with a suite of solutions that deliver real-time measurements, run efficiently and effectively 24×7 in the fab environment, and can be used for high-volume process monitoring and control. Applications include:

• Lithography Process Tool Monitoring
• Cleanroom AMC Monitoring
• Gas Monitoring
• HEPA Filter Management