Trimethylaluminium fire safety in the semiconductor manufacturing has recently come to the forefront of fire safety risk in high-tech processes that use this organoaluminium compound in increasing volumes. Trimethylaluminium is used in various semiconductor processes, usually for the purpose of depositing a layer of Aluminum Oxide as an electrical insulator, in microcircuitry / nanocircuitry device architectures.
Chemical Fire Safety
Please consider for a moment, the advantage of choosing a fire safety system that has global compliance. Whether it’s new semiconductor equipment being manufactured by an original equipment maker, or used equipment being retrofitted or recommissioned for a new application, it is a point of rudimentary prudence to design the equipment and all of the sub-assemblies, including the safety systems, to comply with any and all foreseeable installation and operation requirements.
SESHA ESH for High Technology, presents the Virtual Symposia bringing all the cutting-edge research and practical ES&H information of our live symposium directly to you. Join the entire global ES&H Semiconductor Community for this unique learning experience. Scheduled in weekly three-hour classes, each symposium session features multiple speakers on a specific topic. May – August 2020
Why even bother having a fire safety system, if it’s not going to work? Why buy one if it is going to become defective in a few months’ time? At KFPI, we realize how bothersome fire safety systems can be. We understand how challenging it is to maintain a semiconductor process line. Having to worry about a fire safety system is an added responsibility that few people desire to shoulder. We get it! We really do. But please don’t underestimate the importance of having one, and having one that works.
Fire is one of the gremlins of semiconductor process equipment. Great thought and energy have been dedicated to the task of designing process tools that have the lowest probability for fire hazard. But, all of the elements for equipment fire are still rooted in the reality incompatibles like heat, electricity, and flammable chemistries in ample quantities.
KFPI is frequently called upon to provide fire safety solutions for bulk chemical storage areas. Sometimes these are permanent storage areas for the chemicals used in manufacturing, sometimes they are a temporary holding area being used during movement of manufacturing operates or relocation of bulk chemical storage. Sometimes they are located in a fab or sub fab area, sometimes in an outbuilding or temporary shelter.
The 42nd Annual International High Technology ESH Symposium & Exposition of the Semiconductor Environmental, Safety & Health Association (SESHA) is an educational and research forum. The meeting includes symposia, posters, special programs and workshops, as well as contributed papers in topical sessions. The 2020 Meeting will run from April 13–17 at the Embassy Suites by Hilton Scottsdale Resort in the heart of beautiful Scottsdale, Arizona.
Eugene Ngai of Chemically Speaking LLC has dedicated his career to the understanding and improvement of chemical safety in high-tech applications. He has over 40 years of Specialty Gas experience in production, laboratory, R&D, engineering and safety positions. He continues to be active in a number of worldwide industry association working groups, CGA G-13 (Silane), NFPA 55 (Industrial and Medical Gases), NFPA 400 (Hazardous Materials), NFPA 318 (Semiconductor Facilities), SEMI EHS, SESHA and UN TC58 SC2 WG7 (Gas Toxicity ISO 10298, Flammability, Oxidizer ISO 10156).
Over the past 4+ years KFPI has been involved in the research, testing, and development of fire safety solutions regarding pyrophoric chemicals hazards. This included many projects regarding the fire detection and fire suppression/protection of energetic materials such as pyrophoric liquid metal organics like TMA (trimethyl aluminum).
Fire safety solutions for high technology processes require something more than average technical proficiency and uncertain fire safety components. KFPI has a keen understanding of the requirements of high-technology manufacturing fire safety. All fire safety solutions and products provided by KFPI, meet or exceed all relevant fire safety codes, including NFPA, SEMI, and FM Global standards.