LCAS – Leak Containment & Abatement System

The KFPI LCAS system is an “ADD-ON” safety control system for metalorganic bulk chemical delivery systems. LCAS is a self-contained safety control system which can be attached to an LCAS-compatible MO bulk chemical delivery system or to MO tool gas boxes. This leak containment and abatement system is SEMI S2 compliant, and can safely monitor and control the BCDS environment. In the event of a liquid or vapor leak of metalorganic chemistry inside of the BCDS, the LCAS safely contains and abates the leak, without fire, damage, or particle exposure to the fab – resulting in minimal disruption to production. Metalorganic leaks in semiconductor facilities no longer need to be considered catastrophic scenarios.

LCAS Advantages For Semiconductor Applications.

• No Flame
• No Fire Damage
• Incipient Particles Inside
• No Particles Outside
• No Risk Bleve
• ERT Safety Interlock
• No Secondary Containment
• Small Footprint / Cost

All liquid and gas leaks within the cabinet are continuously routed to the reaction column where any pyrophoric vapor is reacted.

• Liquid TMA is Transported from the Sump
• Liquid TMA is Vaporized in Abatement Chamber
• TMA Vapor Exits Chamber Via Gas Nozzle
• TMA Vapor is Abated with O2 in Reaction Column
• Limit Temp. at Exit of Reaction Column < 100°F
• Adjustable

All Contents are Contained Within BCDS Throughout Abatement:

• MO Liquid
• MO Vapor
• Smoke & By-Products
• N2

Please contact us with your requirements.