LCAS – Leak Containment & Abatement System
LCAS is a fire safety system for semiconductor pyrophoric chemistries / metalorganics storage and delivery systems.
After years of R&D, performance testing, and safety compliance reviews, we have a perfected safety product. LCAS is a fire safety device, designed specifically to address the considerable fire hazard presented to semiconductor production by energetic materials. LCAS monitors bulk distribution systems for pyrophoric metalorganic materials, and in the event of a leak, safely contains and abates the metal organic material without fire, smoke, or particulate damage to semiconductor tools, processes, or clean rooms. Metalorganic leaks in semiconductor facilities no longer need to be considered catastrophic scenarios.
The KFPI LCAS system is an “ADD-ON” safety control system for metalorganic bulk chemical delivery systems. LCAS is a self-contained safety control system which can be attached to an LCAS-compatible MO bulk chemical delivery system or to MO tool gas boxes. This leak containment and abatement system is SEMI S2 compliant, and can safely monitor and control the BCDS environment. In the event of a liquid or vapor leak of metalorganic chemistry inside of the BCDS, the LCAS safely contains and abates the leak, without fire, damage, or particle exposure to the fab – resulting in minimal disruption to production.
How Does It Work? Look Inside!
LCAS Features:
- Safely Mitigates MO Liquid or Vapor Leak
- All Leaks are Contained and Controlled
- All Leaks are Safely Abated
- Isolates MO from O2 Incompatibilities
- Integrated Safety Controls, Detection, & Interlocks
- SEMI S2 / S30 Compliant
***We used Trimethylaluminum as our baseline chemistry for research and development testing. Other pyrophoric metal organics are presently being tested for abatement performance.
LCAS is the only SEMI S2 compliant safety abatement system available for semiconductor metalorganic chemical handling applications.
LCAS Advantages:
- No Flame
- No Fire Damage
- Incipient Particles Inside
- No Particles Outside
- No Risk Bleve
- ERT Safety Interlock
- No Secondary Containment
- Small Footprint / Cost
All liquid and gas leaks within the cabinet are continuously routed to the reaction column where any pyrophoric vapor is reacted.
◆ Liquid TMA is Transported from the Sump
◆ Liquid TMA is Vaporized in Abatement Chamber
◆ TMA Vapor Exits Chamber Via Gas Nozzle
◆ TMA Vapor is Abated with O2 in Reaction Column
◆ Limit Temp. at Exit of Reaction Column < 100°F
◆ Adjustable
All Contents are Contained Within BCDS Throughout Abatement:
◆ MO Liquid
◆ MO Vapor
◆ Smoke & By-Products
◆ N2
