Semiconductor & Cleanroom Applications

HI-FOG Fire Protection

Many customers prefer to use fine water spray fire protection systems for their critical processes. Securiplex Fine Water Spray Systems (FWS) are low-pressure water mist systems, which are installed within process tools, using cleanroom compatible plastics, which reduces the risk of contamination. The use of de-ionized water and nitrogen to create very fine water droplets, eliminates the risk of contamination of the process and products, in the event of a fire suppression system discharge.