Gas Detection Systems & Products

Satellite XT OEM Equivalent Sensors

KFPI is proud to offer an OEM equivalent sensor for use with the Satellite XT gas detection systems. These sensors have been tested in the Satellite XT transmitters and show the required functionality and performance including self-test, alarm levels, LDL, and sensor life.

All these sensor formats have a dedicated socket and a programmed EPROM. Thus, owners of Satellite XT transmitters have a plug-and-play sensor solution. KFPI is offering a broad range of sensors for detecting the hydride gases, such as AsH3, PH3, SiH4, B2H6, and H2Se, as well as for HF, HCl, HBr, Cl2, NH3, and H2, which are commonly used in semiconductor processes.

The following sensor types are available, please contact us if your sensor is not listed.

AsH3 Arsine (3 El.) 9602-6004
AsH3 Arsine (2 El.) 9602-6000
AsH3 Arsine (2 El.) 9602-6002
B2H6 Diborane 9602-6202
Br2 Bromine 9602-6800
C4F6 Hexafluorobutadiene 9602-9732
C5F8 Octafluorocyclopentene 9602-9730
CH3F Methyl Fluoride 9602-9720
CH4 Methane 9602-9900
Cl2 Chlorine 9602-5300
ClF3 Chlorine Trifluoride 9602-7410
ClO2 Chlorine Dioxide 9602-7400
CO Carbon Monoxide 9602-5400
COCl2 Phosgene 9602-6600
1,2-DCE 1,2-Dichloroethylene 9602-9600

C2H4O Ethylene Oxide 9602-8000
F2 Fluorine 9602-6400
F2 Fluorine 9602-6401
GeH4 Germane 9602-6902
H2 Hydrogen (1%) 9602-5100
H2 Hydrogen (4%) 9602-5101
H2S Hydrogen Sulfide 9602-5200
H2S Hydrogen Sulfide (org.) 9602-5201
H2Se Hydrogen Selenide 9602-5601
HBr Hydrogen Bromide 9602-7000
HCl Hydrogen Chloride 9602-5800
HCN Hydrogen Cyanide 9602-5700
HF Hydrogen Fluoride 9602-6500
HMDS Hexamethyldisilazane 9602-6714
HMDS Hexamethyldisilazane 9602-6715

N2H4 Hydrazine 9602-7600
NF3 Nitrogen Trifluoride 9602-9700
NH3 Ammonia (100 ppm) 9602-6704
NH3 Ammonia (1000 ppm) 9602-6705
NO Nitric Oxide 9602-7200
NO2 Nitrogen Dioxide 9602-7300
O2 Oxygen 9602-5500
O3 Ozone 9602-7100
O3 Ozone 9602-7101
PH3 Phosphine (3 El.) 9602-6102
PH3 Phosphine (2 El.) 9602-6100
SF6 Sulfur Hexafluoride 9602-9710
SiH4 Silane 9602-6301
SO2 Sulfur Dioxide 9602-5900
TEOS Tetraethyl Orthosilicate 9602-7500