Trimethylaluminium fire safety in the semiconductor manufacturing has recently come to the forefront of fire safety risk in high-tech processes that use this organoaluminium compound in increasing volumes. Trimethylaluminium is used in various semiconductor processes, usually for the purpose of depositing a layer of Aluminum Oxide as an electrical insulator, in microcircuitry / nanocircuitry device architectures.
Metal Organic Fire Safety
Why even bother having a fire safety system, if it’s not going to work? Why buy one if it is going to become defective in a few months’ time? At KFPI, we realize how bothersome fire safety systems can be. We understand how challenging it is to maintain a semiconductor process line. Having to worry about a fire safety system is an added responsibility that few people desire to shoulder. We get it! We really do. But please don’t underestimate the importance of having one, and having one that works.
We look forward to you joining us in Tucson, Arizona for the 35th annual International Conference on Compound Semiconductor Manufacturing Technology (CS-MANTECH). The conference will be held at the J.W. Marriott Starr Pass Resort nestled in the foothills of the beautiful Catalina Mountains. The CS-MANTECH conference has been the only conference dedicated to featuring manufacturing-focused presentations alongside state of the art compound materials challenges and industry-leading device performance demonstrations, all within a single venue.
The 42nd Annual International High Technology ESH Symposium & Exposition of the Semiconductor Environmental, Safety & Health Association (SESHA) is an educational and research forum. The meeting includes symposia, posters, special programs and workshops, as well as contributed papers in topical sessions. The 2020 Meeting will run from April 13–17 at the Embassy Suites by Hilton Scottsdale Resort in the heart of beautiful Scottsdale, Arizona.
Eugene Ngai of Chemically Speaking LLC has dedicated his career to the understanding and improvement of chemical safety in high-tech applications. He has over 40 years of Specialty Gas experience in production, laboratory, R&D, engineering and safety positions. He continues to be active in a number of worldwide industry association working groups, CGA G-13 (Silane), NFPA 55 (Industrial and Medical Gases), NFPA 400 (Hazardous Materials), NFPA 318 (Semiconductor Facilities), SEMI EHS, SESHA and UN TC58 SC2 WG7 (Gas Toxicity ISO 10298, Flammability, Oxidizer ISO 10156).
Over the past 4+ years KFPI has been involved in the research, testing, and development of fire safety solutions regarding pyrophoric chemicals hazards. This included many projects regarding the fire detection and fire suppression/protection of energetic materials such as pyrophoric liquid metal organics like TMA (trimethyl aluminum).
Fire safety solutions for high technology processes require something more than average technical proficiency and uncertain fire safety components. KFPI has a keen understanding of the requirements of high-technology manufacturing fire safety. All fire safety solutions and products provided by KFPI, meet or exceed all relevant fire safety codes, including NFPA, SEMI, and FM Global standards.
The ancient Greeks considered fire to be one of the major elements in the universe, in addition to water, earth and air. In their world, fire was a fundamental principle of material existence – One can feel fire, as one can feel earth, water and air. One can also see, smell, and touch it, if one were daring enough. Fire was an element with which to shape the world around.
High purity metalorganic precursors are widely used in semiconductor manufacturing, in the production of integrated circuits and devices. These once exotic chemistries are now a standard part of various doping and deposition processes. Semiconductor-grade metalorganics are highly-refined for use as precursors in silicon and compound semiconductor industry processes.